SCARA robot for semiconductor wafer handling


Laser systems for wafer serialization, marking and scribing. Discover our automated solutions for processing semiconductors.

SCARA robot handling large wafer for laser marking serialization

Lasers for Semiconductors

Semiconductor wafer processing typically requires serialization, patterning and roughening operations. And picking the correct laser system for these operations can be complex once you consider all the relevant process variables—such as substrate type, wafer diameter, feature size, slag tolerances, debris volume, throughput and clean room protocols.

CMS Laser’s wafer processing systems offer a wide range of solutions including serialization for traceability, scribing and lapping. Our laser systems can process the full range of semiconductor substrates and coatings—include silicon, sapphire, lithium tantalate, silicon carbide, III-V semiconductors, II-VI semiconductors, and photo resists.

Semiconductor Laser Applications


  • The UV Laser system (355nm) offers the best solution when process tolerances are the most important factor. This system allows geometries and line widths below 5 micron in dimensions and processing with minimal to no slag.


  • These systems produce less particulate than the CO2 Laser System and thus are acceptable for standard fabrication cleanrooms.



  • The CO2 Laser System offers an economical solution suitable for serialization and dicing for use in higher class cleanrooms, when larger geometries and line widths are acceptable and slag is not a major concern.


  • New ultrafast lasers offer true “cold marking” processes and excel in areas where nanosecond lasers fail. These lasers are ideal for certain processing requirements.
Wafer serialization done with laser marking system

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Working with the entire Control Micro Systems team on our project was a pleasure. CMS was capable of meeting and exceeding our goals. They successfully designed and built a machine which increased our throughput by 550%! We are so glad we chose to move forward with CMS.

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In the three years ACR has owned the CMS laser, it has worked flawlessly. In the few instances where ACR needed support in programming, CMS was quick to respond.

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